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Chinese Standard: GB/T 33523.603-2022

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Geometrical product specifications (GPS)—Surface texture:Areal—Part 603:Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments


Standard in brief
Scope of Application:  
本文件规定了相移干涉法(PSI)轮廓和区域表面结构测量显微镜的计量特性。

Basic information
Standard No:GB/T 33523.603-2022
Standard Name:产品几何技术规范(GPS) 表面结构 区域法 第603部分:非接触(相移干涉显微)式仪器的标称特性
English Name:Geometrical product specifications (GPS)—Surface texture:Areal—Part 603:Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Standard Status:现行
Release Date:2022-12-30
Effective Date:2023-04-01
Language of Publication:中文简体

Standard Classification
ICS Number:17.040.20
CCS Number:J04

Related Standards
Adopted Standards:ISO 25178-603:2013
Adopted Standard Name:《产品几何技术规范(GPS) 表面结构 区域法 第603部分:非接触(相移干涉显微)式仪器的标称特性》
Adoption Level:IDT

Publication Information
Number of pages:32
Number of words:56 K
Format:大16
Edition:1
Color Pages:0
Electronic Version:Yes
Color Images:No
Print Publication Date:2022-12-01

Standard Revision Information
Has Amendment:No

Other Information
Application Dept:国家市场监督管理总局、国家标准化管理委员会
Standard Type:CN
Standard Attribute:GB
Other Standard Number:33523.603
Drafter:尉昊赟、闫鹏、马俊杰、刘俭、施玉书、代鲲鹏、朱悦
Drafting Organization:清华大学、山东大学、深圳市中图仪器股份有限公司、哈尔滨工业大学、中机生产力促进中心有限公司、中国计量科学研究院、广州计量检测技术研究院、中机研标准技术研究院(北京)有限公司
Management Organization:全国产品几何技术规范标准化技术委员会(SAC/TC 240)
Proposing Department:全国产品几何技术规范标准化技术委员会(SAC/TC 240)

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