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Germanium monocrystal—Measurement of resistivity-DC linear four-point probe
Standard in brief
Scope of Application:
本标准规定了用直流四探针法测量锗单晶电阻率的方法。
本标准适用于测量试样厚度和从试样边缘与任一探针端点的最近距离二者均大于探针间距的4倍锗单晶的电阻率以及测量直径大于探针间距的10倍、厚度小于探针间距4倍锗单晶圆片(简称圆片)的电阻率。测量范围为1×10-3Ω·cm~1×102Ω·cm。
Basic information
Standard No:GB/T 26074-2010
Standard Name:锗单晶电阻率直流四探针测量方法
English Name:Germanium monocrystal—Measurement of resistivity-DC linear four-point probe
Standard Status:现行
Release Date:2011-01-10
Effective Date:2011-10-01
Language of Publication:中文简体
Standard Classification
ICS Number:77.040.99
CCS Number:H17
Publication Information
Number of pages:12
Number of words:11 K
Format:大16
Edition:1
Color Pages:0
Electronic Version:Yes
Color Images:No
Print Publication Date:2011-06-01
Standard Revision Information
Has Amendment:No
Other Information
Application Dept:中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会
Standard Type:CN
Standard Attribute:GB
Other Standard Number:26074
Drafter:张莉萍、焦欣文、王学武、普世坤
Drafting Organization:南京中锗科技股份有限公司
Management Organization:全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)