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Determination method of Pt-Ru alloy film—Determination of alloyed Pt content and alloyed Ru content by X-ray photoelectron spectroscopy
Standard in brief
Scope of Application:
本标准规定了铂钌(PtRu)合金薄膜材料中合金态铂及合金态钌含量(质量分数)的测定方法。
本标准适用于铂钌合金薄膜材料中合金态铂及合金态钌质量分数的测定,也可适用于各种铂合金薄膜材料中合金态铂质量分数及其他合金态金属质量分数的测定。测定范围:合金态铂质量分数不小于3%,合金态钌质量分数不小于3%。
本标准不适用于单层厚度不大于10 nm的层状薄膜。
Basic information
Standard No:YS/T 644-2007
Standard Name:铂钌合金薄膜测试方法 X射线光电子能谱法测定合金态铂及合金态钌含量
English Name:Determination method of Pt-Ru alloy film—Determination of alloyed Pt content and alloyed Ru content by X-ray photoelectron spectroscopy
Standard Status:现行
Release Date:2007-04-13
Effective Date:2007-10-01
Language of Publication:中文简体
Standard Classification
ICS Number:77.120.99
CCS Number:H68
Publication Information
Number of pages:8
Number of words:6 K
Format:大16
Edition:1
Color Pages:0
Electronic Version:Yes
Color Images:No
Print Publication Date:2007-07-01
Standard Revision Information
Has Amendment:No
Other Information
Application Dept:中华人民共和国国家发展和改革委员会
Standard Type:QT
Standard Attribute:YS
Other Standard Number:644
Drafter:杨滨、李旸、杨喜昆、昝林寒
Drafting Organization:昆明贵金属研究所
Management Organization:全国有色金属标准化技术委员会
Proposing Department:全国有色金属标准化技术委员会