Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer.
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了基于光学干涉显微镜获取MEMS微结构表面形貌进行面内长度测量的方法。本标准适用于表面反射率不低于4%，宽深比不低于1∶10，且使用光学干涉显微镜能够获取形貌的MEMS微结构。
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