Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer.
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了基于光学干涉显微镜获取的微双端固支梁结构表面形貌进行残余应变测量的方法。本标准适用于表面反射率不低于4%且使用光学干涉显微镜能够获取表面形貌的微双端固支梁结构。
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