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Chinese Standard: YS/T 819-2012

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High-purity sputtering copper target used in electronic film


Standard in brief
Scope of Application:  
本标准规定了电子薄膜用高纯铜溅射靶材的要求、试验方法、检验规则和标志、包装、运输、贮存、质量证明书及合同(或订货单)内容。
本标准适用于电子薄膜制造用的各类高纯铜溅射靶材(以下简称高纯铜靶)。

Basic information
Standard No:YS/T 819-2012
Standard Name:电子薄膜用高纯铜溅射靶材
English Name:High-purity sputtering copper target used in electronic film
Standard Status:现行
Release Date:2012-11-07
Effective Date:2013-03-01
Language of Publication:中文简体

Standard Classification
ICS Number:77.150.30
CCS Number:H62

Related Standards
Referenced Standards:GB/T 14265,GJB 1580A,YS/T 347,YS/T 837

Publication Information
Number of pages:12
Number of words:13 K
Format:大16
Edition:1
Color Pages:0
Electronic Version:Yes
Color Images:No
Print Publication Date:2013-03-01

Standard Revision Information
Has Amendment:No

Other Information
Application Dept:中华人民共和国工业和信息化部
Standard Type:QT
Standard Attribute:YS
Other Standard Number:819
Drafter:王学泽、宋佳、高岩、尚再燕、赵永善、袁洁、熊晓东
Drafting Organization:宁波江丰电子材料有限公司、有研亿金新材料股份有限公司
Management Organization:全国有色金属标准化技术委员会(SAC/TC 243)

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