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Specification for photoresist/E-beam resist for hard surface photoplates
Basic information
Standard No：GB/T 16527-1996
Standard Name：硬面感光板中光致抗蚀剂和电子束抗蚀剂规范
English Name：Specification for photoresist/E-beam resist for hard surface photoplates
Standard Status：现行
Release Date：1996-09-09
Effective Date：1997-05-01
Language of Publication：中文简体
Standard Classification
ICS Number：31.200
CCS Number：L90
Related Standards
Referenced Standards：GB 191-90,GB 2828-87,GB 2829-87,GB 7238-87,GB 7239-87,GB/T 15871-1995,GB/T 15870-1995,SJ/T 10584-94
Adopted Standards：SEMI P3-90
Adoption Level：EQV
Publication Information
Number of pages：12
Number of words：10 K
Format：大16
Electronic Version：Yes
Color Images：No
Print Publication Date：1997-05-01
Other Information
Application Dept：国家技术监督局
Standard Type：CN
Standard Attribute：GB
Other Standard Number：16527
Drafter：谈仁良、吴保华、王亦林、韩艳芬
Drafting Organization：长沙韶光微电子总公司、电子工业部标准化研究所
Management Organization：电子工业部标准化研究所
Proposing Department：中华人民共和国电子工业部
