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Chinese Standard: GB/T 34612-2017

Measurement method for X-ray double crystal diffraction rocking curve of sapphire crystals.

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)

本标准规定了蓝宝石晶体X射线双晶衍射摇摆曲线的测量方法。本标准适用于蓝宝石晶体X射线双晶衍射摇摆曲线的测量。

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