Micro electromechanical system technology—Test method for thenonlinear vibration of the MEMS resonant sensitive element.
全国微机电技术标准化技术委员会(SAC/TC 336)
本标准规定了谐振式传感器中MEMS谐振敏感元件（以下简称敏感元件）非线性振动特性参数的测试方法。本标准适用于敏感元件在研制和生产过程中关于非线性振动特性和敏感元件闭环系统频率偏移的测试，其他非MEMS敏感元件可参考使用。
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