Basic specifications for electroheat installations—Part 410:Single crystal growing furnace
全国工业电热设备标准化技术委员会(SAC/TC 121)
GB/T 10067的本部分规定了对TDR晶体炉的术语、产品分类、技术要求、试验方法、检验规则以及标志、包装、运输和贮存。
本部分适用于直拉法拉制半导体硅、锗等单晶的单晶炉。
This standard is the original Chinese electronic standard.
After you successfully purchase, we will send the electronic version of this standard to your email address.
If you have successfully purchased, please go to the plug-in category of the store and download the free plug-in installation package.
If you need translation, please contact email: ChineseStandardsLibraryS001@gmail.com.
