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Chinese Standard: GB/T 11068-2006

Gallium arsenide epitaxial layer—Determination of carrier concentration voltage-capacitance method

全国有色金属标准化技术委员会

本标准规定了砷化镓外延层载流子浓度电容电压测量方法,适用于砷化镓外延层基体材料中载流子浓度的测量。测量范围:1×1014 cm-3~5×1017 cm-3。

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