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Chinese Standard: GB/T 11446.9-2013

Test method for particles in electronic grade water by instrument

中国电子技术标准化研究院

GB/T 11446的本部分规定了电子级水中微粒的仪器测定方法。
本部分适用于电子级水中微粒的连续式或单次检测计数,测定的微粒粒径不小于0.05 μm,微粒的浓度范围为0~10 000个/mL。

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