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Chinese Standard: GB/T 12963-2014

Electronic-grade polycrystalline silicon

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)

本标准规定了多晶硅的要求、试验方法、检验规则以及标志、包装、运输、储存、质量证明书和订货单(或合同)内容。
本标准适用于以氯硅烷、硅烷制得的多晶硅。

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