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Chinese Standard: GB/T 14264-2009

Semiconductor materials—Terms and definitions

全国半导体设备和材料标准化技术委员会材料分技术委员会

本标准规定了半导体材料及其生长工艺、加工、晶体缺陷和表面沾污等方面的主要术语和定义。
本标准适用于元素和化合物半导体材料。

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