Chinese Standard: GB/T 14620-2013

Alumina ceramic substrates for thin film integrated circuits

中国电子技术标准化研究院

本标准规定了薄膜集成电路用氧化铝陶瓷基片的要求、测试方法、检验规则、标志、包装、运输和贮存。
本标准适用于薄膜集成电路用氧化铝陶瓷基片（以下简称“基片”）的生产和采购,采用薄膜工艺的片式元件用氧化铝陶瓷基片也可参照使用。

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