Test methods for minority carrier lifetime in bulk germanium and silicon by measurement of photoconductivity decay
全国半导体设备和材料标准化技术委员会材料分技术委员会
1.1 本标准规定了硅和锗单晶体内少数载流子寿命的测量方法。本标准适用于非本征硅和锗单晶体内载流子复合过程中非平衡少数载流子寿命的测量。
1.2 本标准为脉冲光方法。这种方法不破坏试样的内在特性，试样可以重复测试，但要求试样具有特殊的条形尺寸和研磨的表面，见表1。
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