Chinese Standard: GB/T 1555-2009

Testing methods for determining the orientation of a semiconductor single crystal

全国半导体设备和材料标准化技术委员会材料分技术委员会

本标准规定了半导体单晶晶向X射线衍射定向和光图定向的方法。
本标准适用于测定半导体单晶材料大致平行于低指数原子面的表面取向。

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