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Chinese Standard: GB/T 15862-2012

General specification of ion implantation equipment

中国电子技术标准化研究所

本标准规定了离子注入机的术语、产品分类、技术要求、试验、检验规则和标志、包装、运输、贮存。
本标准适用于半导体工艺用电能离子注入机。其他离子注入机亦可参照使用。

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