$10
General specification of ion implantation equipment
中国电子技术标准化研究所
本标准规定了离子注入机的术语、产品分类、技术要求、试验、检验规则和标志、包装、运输、贮存。
本标准适用于半导体工艺用电能离子注入机。其他离子注入机亦可参照使用。
This standard is the original Chinese electronic standard.
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