$10
Power supply interface for semiconductor equipment
全国电子测量仪器标准化技术委员会(SAC/TC 153)
本标准规定了半导体设备电源接口的供电类别,选择电器附件、导线和电缆的要求等。
本标准适用于半导体设备的电源接口。
This standard is the original Chinese electronic standard.
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