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Chinese Standard: GB/T 15872-2013

Power supply interface for semiconductor equipment

全国电子测量仪器标准化技术委员会(SAC/TC 153)

本标准规定了半导体设备电源接口的供电类别,选择电器附件、导线和电缆的要求等。
本标准适用于半导体设备的电源接口。

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