Test method for the EL2 deep donor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)
本标准规定了半绝缘砷化镓单晶深施主EL2浓度的红外吸收测试方法。
本标准适用于电阻率大于106 Ω·cm的非掺杂和碳掺杂半绝缘砷化镓单晶深施主EL2浓度的测定。
本标准不适用于掺铬半绝缘砷化镓单晶深施主EL2浓度的测定。
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