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Chinese Standard: GB/T 17473.3-2008

Test methods of precious metals pastes used for microelectronics—Determination of sheet resistance

全国有色金属标准化技术委员会

本部分规定了微电子技术用贵金属浆料方阻的测试方法。
本部分适用于微电子技术用贵金属浆料方阻的测定。

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