Surface chemical analysis—Sputter depth profiling—Optimization using layered system as reference materials
IDT ISO 14606:2000
全国微束标准化技术委员会
为使俄歇电子能谱、X射线光电子能谱和二次离子质谱的仪器设定达到深度分辨的优化目的，本标准采用适当的单层和多层膜系参考物质，提供优化溅射深度剖析参数的指南。
特殊多层膜系（如各种掺杂层膜系）的使用不包括在本标准内。
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