Method of thickness measurement for thin crystal by convergent beam electron diffraction
全国微束分析标准化技术委员会
本标准规定了用透射电子显微镜测定薄晶体试样厚度的会聚束电子衍射方法。
本方法适用于测定线度为10－9 m～0.1×10-3 m、厚度在几十至几百纳米范围的薄晶体厚度。
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