Surface chemical analysis—Secondary-ion mass spectrometry—Method for estimating depth resolution parameters with multiple delta-layer reference materials
IDT ISO 20341:2003
全国微束分析标准化技术委员会
本标准详细说明了在SIMS深度剖析中，用多δ层参考物质评估前沿衰变长度、后沿衰变长度和高斯展宽三个深度分辨参数的步骤。
由于样品表面的物理和化学态受一次入射离子影响而不稳定，本标准不适用于近表面区域的δ层。
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