Test methods for photoluminescence analysis of single crystal silicon for Ⅲ-Ⅴ impurities
MOD SEMI MF 1389-0704
全国半导体设备和材料标准化技术委员会材料分技术委员会
本标准规定了硅单晶中Ⅲ-Ⅴ族杂质的光致发光测试方法。
本标准适用于低位错单晶硅中导电性杂质硼和磷含量的同时测定。
本标准用于检测单晶硅中含量为1×1011 at·cm-3~5×1015 at·cm-3的各种电活性杂质元素。
This standard is the original Chinese electronic standard.
If you need translation, please contact email: ChineseStandardsLibraryS001@gmail.com.
After you successfully purchase, we will send the electronic version of this standard to your email address
