Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography
MOD SEMI MF 1982-1103
全国半导体设备和材料标准化技术委员会材料分技术委员会
1.1 本标准规定了硅片表面的有机污染物的定性和定量方法，采用气质联用仪或磷选择检测器或者两者同时采用。
1.2 本标准描述了热解吸气相色谱仪（TD-GC）以及有关样品制备和分析的相关程序。
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