Surface chemical analysis—Secondary-ion mass spectrometry—Determination of relative sensitivity factors from ion-implanted reference materials
IDT ISO 18114:2003
全国微束分析标准化技术委员会
本标准指定了一种由离子注入参考物质确定二次离子质谱分析中相对灵敏度因子的方法。
本标准适用于基体化学成分单一的样品，其中注入物质的峰值原子浓度不超过1%。
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