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Microbeam analysis—Determination method for quantitative analysis parameters of SEM-EDS
全国微束分析标准化技术委员会
本标准规定了扫描电镜能谱仪化学成分定量分析相关参数的测定方法。
本标准适用于对扫描电镜中影响定量分析性能的相关参数和能谱仪基本参数的测定,并以元素成分定量分析结果对仪器做出综合分析。
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