Chinese Standard: GB/T 25494-2010

Test methods for composition analysis of getters

全国半导体设备和材料标准化技术委员会

本标准规定了蒸散型钡吸气剂载料和蒸散钡膜中钡量的测定方法、释汞吸气剂含汞量的测试方法、掺氮吸气剂载料中含氮量的测试方法、蒸散型吸气剂镍含量检测方法。
 本标准适用于真空器件用吸气剂。

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