$10
Test methods for metal releasing characteristics of getters
全国半导体设备和材料标准化技术委员会
本标准规定了吸气剂金属释放特性测试方法,如释汞吸气剂的总释汞量、标准释汞量、释汞特性曲线及热稳定性的测试方法、蒸散型钡吸气剂得钡量的测试方法、掺氮吸气剂钡膜分布测试方法。
本标准适用于真空器件用吸气剂。
This standard is the original Chinese electronic standard.
If you need translation, please contact email: ChineseStandardsLibraryS001@gmail.com.
After you successfully purchase, we will send the electronic version of this standard to your email address