Chinese Standard: GB/T 25497-2010

Test methods for gas absorbency and release of getters

全国半导体设备和材料标准化技术委员会

本标准规定了吸气剂放气量的测试方法、掺氮吸气剂释氮吸气动态曲线的测试方法、释汞吸气剂放气回吸曲线的测试方法、定压法吸气性能测试方法、定容法吸气性能测试方法等吸气剂气体吸放性能测试方法。
 本标准适用于真空器件用吸气剂。

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