$10
Instrumented nanoindentation test—Indentation hardness and modulus of thin film
全国纳米技术标准化技术委员会(SAC/TC 279)
本标准规定了测试薄膜压入硬度和弹性模量的仪器化纳米压入试验方法。
本标准适用于附着在固体表面的薄膜。压入方向为垂直于试样表面方向,压入深度范围通常在纳米量级,也可以扩展至几微米。
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