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Cleanrooms and associated controlled environments—Part 6:Vocabulary
IDT ISO 14644-6:2007
全国洁净室及相关受控环境标准化技术委员会(SAC/TC 319)
GB/T 25915的本部分给出了洁净室和相关受控环境有关的术语和定义,是本系列标准其他部分出现的术语和定义的汇总。本部分也包括了GB/T 25916.1和GB/T 25916.2中的术语和定义。
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