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Chinese Standard: GB/T 26111-2010

Micro-electromechanical system technology—Terms

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了微机电系统领域所涉及的材料、设计、加工、封装、测量以及器件等方面的通用术语和定义。
本标准适用于微机电系统领域的研究、开发、评测和应用。

This standard is the original Chinese electronic standard.
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