Chinese Standard: GB/T 26113-2010

Micro-electromechanical system technology—General rules for the assessment of micro-geometrical parameters

全国微机电技术标准化技术委员会(SAC/TC 336)

本标准规定了微几何量的评定基本原则、评定要素、评定程序、评定方法以及评定规则。
 本标准适用于企业、研究机构、检测机构等从事微机电技术及产品的研究、设计、生产、检测。

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