Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution
IDT ISO 18516:2006
全国微束分析标准化技术委员会(SAC/TC 38)
本标准规定了三种条件下测量俄歇电子能谱仪和X射线光电子能谱仪横向分辨率的方法。直边法适用于横向分辨率预期值大于1 μm的仪器。栅格法适合于横向分辨率预期值大于20 nm，小于1 μm的仪器。金岛法则适用于横向分辨率预期值小于50 nm的仪器。
附录A、附录B和附录C给出了测量横向分辨率的带图的实例。
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