Chinese Standard: GB/T 29190-2012

Measurement methods of drift rate of scanning probe microscope

全国纳米技术标准化技术委员会(SAC/TC 279)

本标准规定了SPM漂移速率的术语和定义、缩略语、测量步骤、性能参数规格，及基于SPM扫描图像的漂移速率测量基本方法。
本标准适用于0.01 nm/s到10 nm/s的漂移速率测量。本标准中的漂移测量不适用于图像校正。

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