Test method for dislocation density of sapphire single crystal
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)
本标准规定了蓝宝石单晶位错密度的测量方法。
本标准适用于抛光加工后位错密度为0个/cm2～100 000个/cm2的蓝宝石单晶位错密度的测量，检测面为{0001}、{1120}、{1012}、{1010}面。
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