Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution,analysis area, and sample area viewed by the analyser
IDT ISO/TR 19319:2003
全国微束分析标准化技术委员会(SAC/TC 38)
本标准规定了俄歇电子能谱和X射线光电子能谱横向分辨率、分析面积和分析器所能检测到的样品面积的测量方法。
本标准适用于俄歇电子能谱和X射线光电子能谱横向分辨率、分析面积和分析器的检测。
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