Chinese Standard: GB/T 29557-2013

Surface chemical analysis—Depth Profiling—Measurment of sputtered depth

IDT  ISO/TR 15969:2001

全国微束标准化技术委员会(SAC/TC 38)

本标准规定了溅射深度剖析中测量溅射深度的准则。
本标准适用于结合离子轰击剥离部分固体样品的表面化学分析技术，通常溅射深度可达几微米。

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