Chinese Standard: GB/T 29658-2013

High-purity sputtering aluminium and aluminium alloy target used in electronic film

全国有色金属标准化技术委员(SAC/TC 243)

本标准规定了电子薄膜制备用高纯铝及铝合金靶材的要求、试验方法、检验规则及标志、包装、运输、存贮、订货单（或合同）等内容。
本标准适用于电子薄膜用各类高纯铝及铝合金溅射靶材（以下简称铝靶）。

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