Test method for measuring boron and aluminium in silicon materials used for photovoltaic applications by secondary ion mass spectrometry
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了用二次离子质谱仪（SIMS）测定光伏电池用硅材料中硼和铝含量的方法。
本标准适用于光伏电池用硅材料中受主杂质硼和铝含量的定量分析，其中硼和铝的浓度均大于1×1013atoms/cm3。其他受主杂质的测量也可参照本标准。
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