Test method for measuring phosphorus,arsenic and antimony in silicon materials used for photovoltaic applications by secondary ion mass spectrometry
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了用二次离子质谱仪（SIMS）测定光伏电池用硅材料中磷、砷和锑含量的方法。
本标准适用于光伏电池用硅材料中施主杂质磷、砷和锑含量的定量分析，其中磷、砷和锑的浓度均大于1×1014atoms/cm3。
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