Chinese Standard: GB/T 30857-2014

Standard test method for thickness and thickness variation on sapphire substrates

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、材料分技术委员会(SAC/TC 203/SC 2)

本标准规定了制备氮化镓薄膜外延片及其他用途的蓝宝石单晶切割片、研磨片、抛光片(简称衬底片)厚度和厚度变化是否满足标准限度要求的测试方法。
本标准适用于蓝宝石衬底片厚度及厚度变化的测试。

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