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Chinese Standard: GB/T 30860-2014

Test methods for surface roughness and saw mark of silicon wafers for solar cells

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、材料分技术委员会(SAC/TC 203/SC 2)

本标准规定了太阳能电池用硅片(以下简称硅片)的表面粗糙度及切割线痕的接触式或非接触式轮廓测试方法。
本标准适用于通过线切工艺加工生产的单晶和多晶硅片。如果需要适用于其他产品,则需相关各方协商同意。

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