$10
Test method for measuring diameter of monocrystalline silicon carbide wafers
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、材料分技术委员会(SAC/TC 203/SC 2)
本标准规定了用千分尺测量碳化硅单晶片直径的方法。
本标准适用于碳化硅单晶片直径的测量。
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