Chinese Standard: GB/T 30868-2014

Test method for measuring micropipe density of monocrystalline silicon carbide wafers—Chemically etching

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、材料分技术委员会(SAC/TC 203/SC 2)

本标准规定了利用熔融氢氧化钾腐蚀法测定碳化硅单晶微管密度的方法。
本标准适用于碳化硅单晶微管密度的测定。

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