Chinese Standard: GB/T 30901-2014

High purity ammonium fluoride solution for industrial use

全国化学标准化技术委员会无机化工分会(SAC/TC 63/SC 1)

本标准规定了高纯氟化铵溶液的分级、要求、试验方法、检验规则、标志、标签、包装、运输、贮存和安全。
本标准适用于高纯氟化铵溶液。该产品主要应用于集成电路和超大规模集成电路芯片的清洗、蚀刻等行业。

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