Chinese Standard: GB/T 31353-2014

Test methods for bow of sapphire substrates

全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)

本标准规定了蓝宝石切割片、研磨片、抛光片（以下简称蓝宝石衬底片）弯曲度的测试方法。
本标准适用于直径50.8 mm～304.8 mm，厚度为不小于200 μm的蓝宝石衬底片弯曲度的测试。

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