Standard practice for determination of the specimen area contributing to the detected signal in Auger electron spectrometers and some X-ray photoelectron spectrometers
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
本标准规定了俄歇电子能谱和部分类型的X射线光电子能谱检测信号对应样品区域的确定方法。
本标准适用于俄歇电子能谱仪和具有以下条件的X射线光电子能谱：入射X光束激发的样品区域大于分析器可检测到的样品区域；光电子从样品到分析器入口的过程中经过自由空间；装配有辅助电子枪可以产生一束可变能量的电子束照射到样品上。
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